The Electroglas 2000 wafer probers (EG 2001 EG 2080 EG 2010 ) are extremely accurate modularly designed automatic wafer probers configured to perform automatic system functions of:
Automatic wafer load
Automatic wafer alignment
Automatic wafer measurement
Automatic wafer test/sort.
The Electroglas 2000 series wafer prober station have been available in variety of ever-expanding configurations depending on the needs of the user. The basic (minimum) configuration of the EG 2001X EG 2001CX wafe prober consists of:
forcer (X/Y motor) andamp; platen
ring carrier microscope post andamp; microscope
power module (with logic andamp; driver sections)
monitor
monitor console
operator’s console
custom table
The Electroglas 2000 prober ( EG 2001X EG 2001CX EG 2080 EG 2010 ) wafer prober station may be seen in other configurations including any of the following options:
Autoalign
Autoloader (material handling)
Disk Drives andamp; Controller
Hot Chuck andamp; Controller
Ink Dot Inspection (an Autoalign option)
OCR (optical character recognition)
Probe Mark Inspection (an Autoalign option)
Profiler (non-contact edge sensor)
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